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MEMS (micro-electromechanical systems)
Posted by: Margaret
Rouse
A MEMS (microelectromechanical system) is a miniature
machine that has both mechanical and electronic components. The physical
dimension of a MEMS can range from several millimeters to less than one micrometer, a dimension many times smaller
than the width of a human hair.
The Internet of Things (IoT) world may be exciting, but
there are serious technical challenges that need to be addressed, especially by
developers. In this handbook, learn how to meet the security, analytics, and
testing requirements for IoT applications.
The label MEMS is being used to describe both a category
of micromechatronic devices and the processes used when manufacturing them.
Some MEMS don’t even have mechanical parts, yet they are classified as MEMS
because they miniaturize structures used in conventional machinery, such as
springs, channels, cavities, holes and membranes. Because some MEMS devices
convert a measured mechanical signal into an electrical or optical signal, they
may also be referred to as transducers. In Japan, MEMS are more
commonly known as micromachines, and in European countries, MEMS are more
commonly referred to as microsystems technology (MST). In the United States,
the acronym “MEMS” rhymes with the word “stems.”
Unlike conventional mechatronic devices, MEMS are often
manufactured with the same batch fabrication techniques used to create integrated circuits (ICs) and many
commercial MEMS products are integrated and packaged together with ICs. MEMS
fabrication allows micro-sensors,
which gather data, and micro-actuators, which convert energy into
motion, to integrate on the same substrate.
The MEMS below is actually a disposable, wearable insulin
pump for managing diabetes, designed by Debiotech and
STMicroelectronics. According to Debiotech, the chip is a stack of 3
layers bonded together: a silicon on insulator (SOI) plate with
micromachined pump structures and two silicon cover plates with through-holes.
A piezoelectric actuator on the chip moves
the membrane in a reciprocating movement to compress and decompress fluid in
the pumping chamber.
Although MEMS have a low per-device production cost,
packaging can be a challenge. Each MEMS must be packaged so that electrical or
optical circuitry and other device components
remain free from air and water contamination, while still being able to
interact with the surrounding environment and accomodate motion.
MEMS was an emerging technology a few years ago, but
today most people interact with MEMS on a daily basis. Each new automobile that
rolls off an assembly line has at least 50 MEMS; they are important components
in various mandated safety systems, including air bags, electronic stability
control (ESC) and tire pressure monitoring systems (TPMS).
The small system on a chip (SOC) that automatically adjusts screen
orientation on a smart phone is another example of a MEMS many people interact
with each day. As MEMS become smaller, require less power and are less
expensive to manufacture, they are expected to play an important part in the
wireless internet of things (IoT) and home automation.
Other commercial applications of MEMS include:
·
Sensor-driven
heating and cooling systems for building
management systems.
·
Micro-mirror
arrays for high definition projection systems.
·
Smart dust
for the detection of environmental changes in molecular
manufactuing (nanotechnology) clean rooms.
·
Micronozzles to
control the flow of ink in inkjet
printers.
·
Tiny gyroscopes,
barometers, accelerometers
and microphones
to support mobile apps.
·
Disposable pressure
sensors for use in healthcare.
·
Optical
switching devices that allow one optical signal to control another
optical signal.
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